Standardization of Nanofabrication processes

Launching a new “Go Fair” Implementation network

  • How to store or transfer know-how?

  • Is it possible to describe a NF process with enough accuracy to reproduce it?

EuroNanoLab has launched a new GO FAIR Implementation Network « GO NANOFAB » to work on these questions. It was approved on March 2020

FAIR data description

  • Standardize the description of Nanofabrication Process Data
  • Use PIDs for machines, operators, etc. & Metadata enabling reusability of Data using the FAIR approach
  • Build digital twins of NF process steps to design more complex processes (engineering approach)
  • Automatic capture of process data
FAIR: Findable, Accessible, Interoperable & Reusable